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The invention provides a silicon nitride powder preparation method which includes the following steps that firstly, 1000 parts of liquid ammonia is added into a high-pressure reactor, and the temperature is raised; secondly, 50-200 parts of chloro-disilane is added into the high-pressure reactor under the stirring condition; thirdly, a closed filter is used for filtering reaction products; fourthly, solid products are washed through liquid ammonia to obtain (NH2)6Si2 solid; fifthly, the (NH2)6Si2 solid is desorbed in a vacuum closed furnace; sixthly, the desorbed (NH2)6Si2 solid is placed in a tubular furnace for high-temperature thermal decomposition, and silicon nitride powder is obtained after cooling along with the furnace. The silicon nitride powder preparation method has the following advantages that electricity consumption for freezing required by low-temperature reactions is greatly reduced; the reaction speed and washing efficiency are high; the reaction intermediate product (NH2)6Si2 solid is low in calcination temperature.
The invention provides a silicon nitride powder preparation method which includes the following steps that firstly, 1000 parts of liquid ammonia is added into a high-pressure reactor, and the temperature is raised; secondly, 50-200 parts of chloro-disilane is added into the high-pressure reactor under the stirring condition; thirdly, a closed filter is used for filtering reaction products; fourthly, solid products are washed through liquid ammonia to obtain (NH2)6Si2 solid; fifthly, the (NH2)6Si2 solid is desorbed in a vacuum closed furnace; sixthly, the desorbed (NH2)6Si2 solid is placed in a tubular furnace for high-temperature thermal decomposition, and silicon nitride powder is obtained after cooling along with the furnace. The silicon nitride powder preparation method has the following advantages that electricity consumption for freezing required by low-temperature reactions is greatly reduced; the reaction speed and washing efficiency are high; the reaction intermediate product (NH2)6Si2 solid is low in calcination temperature.
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Europäisches Patentamt | 2024
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