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Multi-element doped tin oxide-based target material as well as preparation method and application thereof
The invention discloses a multi-element doped tin oxide-based target material as well as a preparation method and application thereof. Relates to the technical field of photovoltaic cells. The tin oxide-based target material comprises the following components in percentage by mass: 95-98% of tin oxide; 1-3% of zinc oxide; 0.5 to 1% of antimony oxide; and 0.5-1% of cerium oxide. According to the tin oxide-based target material disclosed by the invention, the zinc oxide is doped, so that a sintering assisting effect on the tin oxide-based target material can be achieved; cerium oxide is doped to promote the growth of tin oxide crystal lattices, and meanwhile, a large number of electrons are generated, so that the conductivity of a sintered body is greatly improved; antimony oxide is doped to provide a large amount of free electrons, so that the resistivity of tin oxide is effectively reduced.
本发明公开了一种多元掺杂氧化锡基靶材及其制备方法与应用。涉及光伏电池技术领域。上述氧化锡基靶材，包括以下质量比的组分：氧化锡，95‑98％；氧化锌，1‑3％；氧化锑，0.5‑1％；氧化铈，0.5‑1％。本发明的氧化锡基靶材，通过掺杂氧化锌，能够对氧化锡基靶材起到助烧的作用；掺杂氧化铈以促进了氧化锡晶格的生长，同时也产生了大量的电子，大大增加了烧结体的导电性能；掺杂氧化锑以提供大量自由电子，有效降低氧化锡的电阻率。
Multi-element doped tin oxide-based target material as well as preparation method and application thereof
The invention discloses a multi-element doped tin oxide-based target material as well as a preparation method and application thereof. Relates to the technical field of photovoltaic cells. The tin oxide-based target material comprises the following components in percentage by mass: 95-98% of tin oxide; 1-3% of zinc oxide; 0.5 to 1% of antimony oxide; and 0.5-1% of cerium oxide. According to the tin oxide-based target material disclosed by the invention, the zinc oxide is doped, so that a sintering assisting effect on the tin oxide-based target material can be achieved; cerium oxide is doped to promote the growth of tin oxide crystal lattices, and meanwhile, a large number of electrons are generated, so that the conductivity of a sintered body is greatly improved; antimony oxide is doped to provide a large amount of free electrons, so that the resistivity of tin oxide is effectively reduced.
本发明公开了一种多元掺杂氧化锡基靶材及其制备方法与应用。涉及光伏电池技术领域。上述氧化锡基靶材，包括以下质量比的组分：氧化锡，95‑98％；氧化锌，1‑3％；氧化锑，0.5‑1％；氧化铈，0.5‑1％。本发明的氧化锡基靶材，通过掺杂氧化锌，能够对氧化锡基靶材起到助烧的作用；掺杂氧化铈以促进了氧化锡晶格的生长，同时也产生了大量的电子，大大增加了烧结体的导电性能；掺杂氧化锑以提供大量自由电子，有效降低氧化锡的电阻率。
Multi-element doped tin oxide-based target material as well as preparation method and application thereof
一种多元掺杂氧化锡基靶材及其制备方法与应用
CHEN LU (Autor:in) / DING JINDUO (Autor:in) / GE CHUNQIAO (Autor:in) / LIANG QIYING (Autor:in) / GAO YUHANG (Autor:in) / LUO ZEYU (Autor:in)
12.07.2024
Patent
Elektronische Ressource
Chinesisch
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