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Novel low-doped high-conductivity multi-element oxide target material and preparation method thereof
The invention aims to provide a novel low-doped high-conductivity multi-element oxide target material and a preparation method thereof, a third oxide element is added into an indium hafnium oxide material, the indium hafnium oxide material can be prepared by adopting atmospheric sintering to reduce the equipment investment cost, and the density and the conductivity of the target material are improved by adding the third element; the indium hafnium oxide coating film is long in wavelength and high in light transmittance, so that the light transmittance of the heterojunction solar cell is improved, and the conversion efficiency is improved. The method of slip casting and high-temperature sintering is used for manufacturing related coating materials (target materials) for the first time, the uniformity of the target materials is high, the uniformity of the coating materials and the coating quality are improved, and the method is suitable for large-scale mass production. Due to the characteristics of high weather resistance, low damage, high light transmission, low resistance and better moisture resistance of the coating film, the performance requirements of a solar cell, a touch screen, a display, an organic light emitting diode or an electrochromic device can be effectively met.
本发明目的是提供种一种新型低掺杂高导电性多元氧化物靶材及制备方法,由添加第三种氧化物元素在氧化铟铪材料中,氧化铟铪材料的制作可以采用大气烧结降低设备投入成本,藉由第三种元素的添加提高靶材密度及导电性,氧化铟铪镀膜长波长透光性高有助于异质结太阳能电池透光度提高,增加转换效率。首创使用注浆成型加高温烧结的方式来制作相关镀膜材料(靶材),靶材均匀性高有利于提高镀膜材料均匀性及提高镀膜的质量,适合大规模量产。由于镀膜高耐候、低损伤、高透光、低电阻及较佳阻水气性的特性可以有效满足太阳能电池、触摸屏、显示器、有机发光二极管或是电致变色器件的性能需求。
Novel low-doped high-conductivity multi-element oxide target material and preparation method thereof
The invention aims to provide a novel low-doped high-conductivity multi-element oxide target material and a preparation method thereof, a third oxide element is added into an indium hafnium oxide material, the indium hafnium oxide material can be prepared by adopting atmospheric sintering to reduce the equipment investment cost, and the density and the conductivity of the target material are improved by adding the third element; the indium hafnium oxide coating film is long in wavelength and high in light transmittance, so that the light transmittance of the heterojunction solar cell is improved, and the conversion efficiency is improved. The method of slip casting and high-temperature sintering is used for manufacturing related coating materials (target materials) for the first time, the uniformity of the target materials is high, the uniformity of the coating materials and the coating quality are improved, and the method is suitable for large-scale mass production. Due to the characteristics of high weather resistance, low damage, high light transmission, low resistance and better moisture resistance of the coating film, the performance requirements of a solar cell, a touch screen, a display, an organic light emitting diode or an electrochromic device can be effectively met.
本发明目的是提供种一种新型低掺杂高导电性多元氧化物靶材及制备方法,由添加第三种氧化物元素在氧化铟铪材料中,氧化铟铪材料的制作可以采用大气烧结降低设备投入成本,藉由第三种元素的添加提高靶材密度及导电性,氧化铟铪镀膜长波长透光性高有助于异质结太阳能电池透光度提高,增加转换效率。首创使用注浆成型加高温烧结的方式来制作相关镀膜材料(靶材),靶材均匀性高有利于提高镀膜材料均匀性及提高镀膜的质量,适合大规模量产。由于镀膜高耐候、低损伤、高透光、低电阻及较佳阻水气性的特性可以有效满足太阳能电池、触摸屏、显示器、有机发光二极管或是电致变色器件的性能需求。
Novel low-doped high-conductivity multi-element oxide target material and preparation method thereof
一种新型低掺杂高导电性多元氧化物靶材及制备方法
HUANG XIN'ER (Autor:in) / HUANG YUXIANG (Autor:in)
23.06.2023
Patent
Elektronische Ressource
Chinesisch
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