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Special graphite crucible for crystal growth furnace and preparation method thereof
The invention discloses a special graphite crucible for a crystal growth furnace and a preparation method of the special graphite crucible, a semi-coking carbon product with self-adhesion is adopted as a raw material, graphene powder and pitch coke powder are adopted as microstructure regulators, the raw materials are mixed for multiple rounds to prepare pressed powder, and then the pressed powder is subjected to preforming, isostatic pressing forming, carbonization, graphitization and machining to obtain the special graphite crucible for the crystal growth furnace. And the graphite crucible meeting the requirements of a crystal growth furnace is prepared. According to the invention, through the introduction of the nano-scale and micron-scale microstructure regulators, on one hand, the interface bonding property of the semi-coking raw material is improved, and the microstructure of the product is optimized; and on the other hand, the structural regulating agent is used as a reinforcing agent, so that the structural supporting force of the graphite crucible is enhanced, intercalation corrosion of silicon steam to the graphite crucible under a high-temperature condition is also prevented, the structural stability of the graphite crucible is effectively improved, and the service life of the graphite crucible is effectively prolonged. In addition, the main raw materials are industrial semi-finished products in the coal chemical industry or the petrochemical industry, are wide in source and low in price, and are suitable for large-scale batch production.
本发明公开了一种长晶炉专用石墨坩埚及其制备方法,采用具有自粘结性的半焦化炭素产品为原料,以石墨烯粉与沥青焦粉为微观结构调控剂,经多轮次的原料混合制成压粉,再将压粉经过预成型、等静压成型、炭化、石墨化以及机加工,制备出满足长晶炉需求的石墨坩锅。本发明通过纳米级与微米级微观结构调控剂的引入,一方面改善了半焦化原材料的界面结合性,优化了产品的微观结构;另一方面结构调控剂作为补强剂,同时强化了石墨坩锅的结构支撑力,也阻止了高温条件下硅蒸汽对石墨坩锅的插层腐蚀,有效提高了石墨坩埚的结构稳定性和使用寿命。此外,本发明的主要原材料为煤化工或石油化工行业的工业半成品,来源广泛、价格低廉,适合大规模批量化生产。
Special graphite crucible for crystal growth furnace and preparation method thereof
The invention discloses a special graphite crucible for a crystal growth furnace and a preparation method of the special graphite crucible, a semi-coking carbon product with self-adhesion is adopted as a raw material, graphene powder and pitch coke powder are adopted as microstructure regulators, the raw materials are mixed for multiple rounds to prepare pressed powder, and then the pressed powder is subjected to preforming, isostatic pressing forming, carbonization, graphitization and machining to obtain the special graphite crucible for the crystal growth furnace. And the graphite crucible meeting the requirements of a crystal growth furnace is prepared. According to the invention, through the introduction of the nano-scale and micron-scale microstructure regulators, on one hand, the interface bonding property of the semi-coking raw material is improved, and the microstructure of the product is optimized; and on the other hand, the structural regulating agent is used as a reinforcing agent, so that the structural supporting force of the graphite crucible is enhanced, intercalation corrosion of silicon steam to the graphite crucible under a high-temperature condition is also prevented, the structural stability of the graphite crucible is effectively improved, and the service life of the graphite crucible is effectively prolonged. In addition, the main raw materials are industrial semi-finished products in the coal chemical industry or the petrochemical industry, are wide in source and low in price, and are suitable for large-scale batch production.
本发明公开了一种长晶炉专用石墨坩埚及其制备方法,采用具有自粘结性的半焦化炭素产品为原料,以石墨烯粉与沥青焦粉为微观结构调控剂,经多轮次的原料混合制成压粉,再将压粉经过预成型、等静压成型、炭化、石墨化以及机加工,制备出满足长晶炉需求的石墨坩锅。本发明通过纳米级与微米级微观结构调控剂的引入,一方面改善了半焦化原材料的界面结合性,优化了产品的微观结构;另一方面结构调控剂作为补强剂,同时强化了石墨坩锅的结构支撑力,也阻止了高温条件下硅蒸汽对石墨坩锅的插层腐蚀,有效提高了石墨坩埚的结构稳定性和使用寿命。此外,本发明的主要原材料为煤化工或石油化工行业的工业半成品,来源广泛、价格低廉,适合大规模批量化生产。
Special graphite crucible for crystal growth furnace and preparation method thereof
一种长晶炉专用石墨坩埚及其制备方法
GUO QUANGUI (Autor:in) / ZHAO HONGCHAO (Autor:in) / LV HONGBO (Autor:in) / ZONG XUWEI (Autor:in)
03.09.2024
Patent
Elektronische Ressource
Chinesisch
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