Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Zinc oxide-based composite target material and preparation method and application thereof
The invention discloses a zinc oxide-based composite target material and a preparation method and application thereof, and belongs to the technical field of solar cells in the photovoltaic industry. Every 100 parts of preparation raw materials of the composite target material comprise 0.8-1.2 parts of a first mixture, 0.8-1.5 parts of aluminum oxide, 0.4-0.8 part of other metal oxides and 96.5-98 parts of zinc oxide, the first mixture comprises yttrium oxide, barium carbonate and copper oxide in a ratio of 1: (1.8-2.2): (2.8-3.2); the metal in the other metal oxides is selected from at least one of gallium, indium and magnesium. The composite target material has relatively high conductivity and density and low impurity content, and is suitable for transparent conductive electrodes in the photovoltaic industry. The preparation method comprises the following steps: carrying out first-time ball milling, drying, first-time vacuum sintering, second-time ball milling, cold isostatic pressing, second-time vacuum sintering and hot pressed sintering on the preparation raw materials. The method is simple, easy to operate and suitable for industrial production.
本发明公开了一种氧化锌基复合靶材及其制备方法与应用，属于光伏行业太阳电池技术领域。该复合靶材的每100份制备原料包括0.8～1.2份第一混合物、0.8～1.5份氧化铝、0.4～0.8份其它金属氧化物及96.5～98份氧化锌；第一混合物包括1:(1.8～2.2):(2.8～3.2)的氧化钇、碳酸钡和氧化铜；其它金属氧化物中的金属选自镓、铟和镁中的至少一种。该复合靶材具有较高的导电性及致密度，杂质含量低，适用于光伏行业中的透明导电电极。其制备方法包括：将制备原料进行第一次球磨、干燥、第一次真空烧结、第二次球磨、冷等静压、第二次真空烧结及热压烧结。该方法简单，易操作，可工业化生产。
Zinc oxide-based composite target material and preparation method and application thereof
The invention discloses a zinc oxide-based composite target material and a preparation method and application thereof, and belongs to the technical field of solar cells in the photovoltaic industry. Every 100 parts of preparation raw materials of the composite target material comprise 0.8-1.2 parts of a first mixture, 0.8-1.5 parts of aluminum oxide, 0.4-0.8 part of other metal oxides and 96.5-98 parts of zinc oxide, the first mixture comprises yttrium oxide, barium carbonate and copper oxide in a ratio of 1: (1.8-2.2): (2.8-3.2); the metal in the other metal oxides is selected from at least one of gallium, indium and magnesium. The composite target material has relatively high conductivity and density and low impurity content, and is suitable for transparent conductive electrodes in the photovoltaic industry. The preparation method comprises the following steps: carrying out first-time ball milling, drying, first-time vacuum sintering, second-time ball milling, cold isostatic pressing, second-time vacuum sintering and hot pressed sintering on the preparation raw materials. The method is simple, easy to operate and suitable for industrial production.
本发明公开了一种氧化锌基复合靶材及其制备方法与应用，属于光伏行业太阳电池技术领域。该复合靶材的每100份制备原料包括0.8～1.2份第一混合物、0.8～1.5份氧化铝、0.4～0.8份其它金属氧化物及96.5～98份氧化锌；第一混合物包括1:(1.8～2.2):(2.8～3.2)的氧化钇、碳酸钡和氧化铜；其它金属氧化物中的金属选自镓、铟和镁中的至少一种。该复合靶材具有较高的导电性及致密度，杂质含量低，适用于光伏行业中的透明导电电极。其制备方法包括：将制备原料进行第一次球磨、干燥、第一次真空烧结、第二次球磨、冷等静压、第二次真空烧结及热压烧结。该方法简单，易操作，可工业化生产。
Zinc oxide-based composite target material and preparation method and application thereof
一种氧化锌基复合靶材及其制备方法与应用
FENG HAIQUAN (Autor:in) / LYU JIANGANG (Autor:in) / WANG FENGLIN (Autor:in)
29.10.2024
Patent
Elektronische Ressource
Chinesisch
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