Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Zinc tin oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a preparation method of a tin zinc oxide target material, which comprises the following steps: mixing, dispersing and grinding zinc oxide powder and a first dispersing agent to prepare slurry I, adding tin dioxide powder into the slurry I, mixing with a second dispersing agent, dispersing and grinding to prepare slurry II, and drying the slurry II to obtain the tin zinc oxide target material. The preparation method comprises the following steps: preparing a slurry II from zinc oxide and tin dioxide, then adding a binder into the slurry II, dispersing, grinding to obtain a slurry III, and finally carrying out die filling, drying molding, dehydration curing, degreasing and sintering on the slurry III to obtain the tin zinc oxide target material. The tin-zinc oxide target material with relatively high relative density and good conductivity is obtained, and in addition, the invention further discloses the tin-zinc oxide target material.
本申请属于靶材制备技术领域，公开了一种氧化锡锌靶材的制备方法，该方法先将氧化锌粉末与第一分散剂混合、分散、研磨，制得浆料一，再向浆料一中加入二氧化锡粉末并与第二分散剂混合、分散、研磨，制得浆料二，随后再向浆料二中加入粘结剂、分散、研磨，制得浆料三，最后将浆料三装模、干燥成型、脱水固化、脱脂、烧结，得到氧化锡锌靶材，本申请通过对氧化锌、二氧化锡配置浆料过程中的多次分散及对分散剂的优化，得到了一种具有较高的相对密度及良好的导电性能的氧化锡锌靶材，此外，本申请还公开了一种氧化锡锌靶材。
Zinc tin oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a preparation method of a tin zinc oxide target material, which comprises the following steps: mixing, dispersing and grinding zinc oxide powder and a first dispersing agent to prepare slurry I, adding tin dioxide powder into the slurry I, mixing with a second dispersing agent, dispersing and grinding to prepare slurry II, and drying the slurry II to obtain the tin zinc oxide target material. The preparation method comprises the following steps: preparing a slurry II from zinc oxide and tin dioxide, then adding a binder into the slurry II, dispersing, grinding to obtain a slurry III, and finally carrying out die filling, drying molding, dehydration curing, degreasing and sintering on the slurry III to obtain the tin zinc oxide target material. The tin-zinc oxide target material with relatively high relative density and good conductivity is obtained, and in addition, the invention further discloses the tin-zinc oxide target material.
本申请属于靶材制备技术领域，公开了一种氧化锡锌靶材的制备方法，该方法先将氧化锌粉末与第一分散剂混合、分散、研磨，制得浆料一，再向浆料一中加入二氧化锡粉末并与第二分散剂混合、分散、研磨，制得浆料二，随后再向浆料二中加入粘结剂、分散、研磨，制得浆料三，最后将浆料三装模、干燥成型、脱水固化、脱脂、烧结，得到氧化锡锌靶材，本申请通过对氧化锌、二氧化锡配置浆料过程中的多次分散及对分散剂的优化，得到了一种具有较高的相对密度及良好的导电性能的氧化锡锌靶材，此外，本申请还公开了一种氧化锡锌靶材。
Zinc tin oxide target material and preparation method thereof
一种氧化锡锌靶材及其制备方法
GU DESHENG (Autor:in) / SHAO XUELIANG (Autor:in) / LI KAIJIE (Autor:in) / LUO SISHI (Autor:in) / ZHANG XINGYU (Autor:in)
19.07.2024
Patent
Elektronische Ressource
Chinesisch
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