Zinc magnesium oxide target material and preparation method thereof: Fid-Bau Portal

Zinc magnesium oxide target material and preparation method thereof

YU FANG / TONG PEIYUN / ZHU LIU

The invention belongs to the technical field of sputtering target materials, and discloses a preparation method of a zinc magnesium oxide target material, which comprises the following steps: mixing zinc oxide powder and magnesium oxide powder to obtain mixed powder; the mixed powder is put into a mold for cold isostatic pressing, pre-sintering and crushing, and pre-sintered powder is obtained; putting the pre-sintered powder into a stainless steel sheath, carrying out hot isostatic pressing sintering, cooling to normal temperature and normal pressure, and polishing to obtain a zinc magnesium oxide target material; wherein the presintering temperature ranges from 800 DEG C to 900 DEG C, and the presintering time ranges from 30 min to 50 min; in addition, the invention further discloses the zinc magnesium oxide target material, the raw material powder of the zinc magnesium oxide target material is pre-sintered, the smoothness of the surface of the zinc magnesium oxide target material is improved, and therefore the utilization rate of the material is improved.

本申请属于溅射靶材技术领域，公开了一种氧化锌镁靶材的制备方法包含以下步骤：将氧化锌粉末、氧化镁粉末混合后，得到混合粉体；将混合粉体装入模具进行冷等静压、预烧结、破碎，得到预烧结粉体；将预烧结粉体装入不锈钢包套中，热等静压烧结、降至常温常压、打磨，得到氧化锌镁靶材；其中预烧结温度为800～900℃，预烧结时间为30～50min；此外本申请还公开了一种氧化锌镁靶材，通过对氧化锌镁靶材的原料粉末进行预烧结，提升氧化锌镁靶材表面的平整性，从而提升材料的利用率。

Zugriff

Download

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren