Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Barium-doped indium tin zinc oxide target material and preparation method thereof
The invention belongs to the field of target material preparation, and discloses a preparation method of a barium-doped indium tin zinc oxide target material. Comprising the following steps: weighing powder; zinc oxide powder, tin oxide powder and a first dispersing agent are poured into a container containing pure water to prepare slurry I; adding barium oxide powder and a second dispersing agent into the slurry I to prepare slurry II; adding indium oxide powder and a third dispersing agent into the slurry II to prepare slurry III; adding a binder into the slurry III to prepare slurry IV; carrying out spray granulation by taking the fourth slurry as a raw material to obtain barium-doped indium tin zinc oxide powder; performing compression molding by taking the barium-doped indium tin zinc oxide powder as a raw material to obtain a target blank; and the target blank is sequentially subjected to degreasing heat treatment and sintering heat treatment, and the barium-doped indium tin zinc oxide target material is obtained. Barium element doping is creatively carried out, combination of metal elements and oxygen elements in unit cells is enhanced, defects in the target material are reduced, and the resistance of the target material is reduced.
本发明属于靶材制备领域，公开了一种钡掺杂氧化铟锡锌靶材的制备方法。包括以下步骤：称取粉末；将氧化锌粉末、氧化锡粉末和第一分散剂倒入盛有纯水的容器中制备浆料一；将氧化钡粉末和第二分散剂加入浆料一中制备浆料二；将氧化铟粉末和第三分散剂加入浆料二制备浆料三；向浆料三中加入粘结剂制备浆料四；以浆料四为原料进行喷雾造粒，得钡掺杂氧化铟锡锌粉末；以钡掺杂氧化铟锡锌粉末为原料进行压制成型，得靶坯；将靶坯依次进行脱脂热处理、烧结热处理，得钡掺杂氧化铟锡锌靶材。本申请创造性的进行钡元素掺杂，加强了晶胞中金属元素和氧元素的结合，减少靶材中缺陷的产生，降低靶材电阻。
Barium-doped indium tin zinc oxide target material and preparation method thereof
The invention belongs to the field of target material preparation, and discloses a preparation method of a barium-doped indium tin zinc oxide target material. Comprising the following steps: weighing powder; zinc oxide powder, tin oxide powder and a first dispersing agent are poured into a container containing pure water to prepare slurry I; adding barium oxide powder and a second dispersing agent into the slurry I to prepare slurry II; adding indium oxide powder and a third dispersing agent into the slurry II to prepare slurry III; adding a binder into the slurry III to prepare slurry IV; carrying out spray granulation by taking the fourth slurry as a raw material to obtain barium-doped indium tin zinc oxide powder; performing compression molding by taking the barium-doped indium tin zinc oxide powder as a raw material to obtain a target blank; and the target blank is sequentially subjected to degreasing heat treatment and sintering heat treatment, and the barium-doped indium tin zinc oxide target material is obtained. Barium element doping is creatively carried out, combination of metal elements and oxygen elements in unit cells is enhanced, defects in the target material are reduced, and the resistance of the target material is reduced.
本发明属于靶材制备领域，公开了一种钡掺杂氧化铟锡锌靶材的制备方法。包括以下步骤：称取粉末；将氧化锌粉末、氧化锡粉末和第一分散剂倒入盛有纯水的容器中制备浆料一；将氧化钡粉末和第二分散剂加入浆料一中制备浆料二；将氧化铟粉末和第三分散剂加入浆料二制备浆料三；向浆料三中加入粘结剂制备浆料四；以浆料四为原料进行喷雾造粒，得钡掺杂氧化铟锡锌粉末；以钡掺杂氧化铟锡锌粉末为原料进行压制成型，得靶坯；将靶坯依次进行脱脂热处理、烧结热处理，得钡掺杂氧化铟锡锌靶材。本申请创造性的进行钡元素掺杂，加强了晶胞中金属元素和氧元素的结合，减少靶材中缺陷的产生，降低靶材电阻。
Barium-doped indium tin zinc oxide target material and preparation method thereof
一种钡掺杂氧化铟锡锌靶材及其制备方法
XIONG HAO (Autor:in) / LI KAIJIE (Autor:in) / WANG QIFENG (Autor:in) / ZHANG GAOXIANG (Autor:in)
12.11.2024
Patent
Elektronische Ressource
Chinesisch
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