Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of fine-grain high-strength indium titanium tantalum cerium oxide target material
The invention discloses a fine-grain high-strength indium titanium tantalum cerium oxide target material and a preparation method thereof. The preparation method comprises the following steps: (1) weighing indium oxide powder, titanium oxide powder, tantalum pentoxide powder and cerium oxide powder; (2) mixing and dispersing the weighed powder, a dispersing agent and a binding agent, and performing wet grinding to obtain mixed slurry; (3) carrying out spray granulation by taking the mixed slurry as a raw material to obtain mixed oxide powder; (4) carrying out compression molding to obtain a target blank; (5) the target blank is sequentially subjected to degreasing sintering and two-section type normal-pressure sintering, the indium titanium tantalum cerium oxide target material is obtained, and the two-section type normal-pressure sintering comprises the steps that the temperature is increased to 1400-1500 DEG C, and heat preservation is conducted for 5-10 h; and the temperature is reduced to 1320-1370 DEG C, and heat preservation is conducted for 35-50 h. The microstructure of the target material becomes more uniform, the grain size is remarkably refined, and the bending strength is remarkably improved.
本发明公开了一种细晶高强度的氧化铟钛钽铈靶材及其制备方法。制备方法包括以下步骤：（1）称取氧化铟粉末、氧化钛粉末、五氧化二钽粉末、氧化铈粉末；（2）将称取的粉末与分散剂、粘结剂混合分散，经过湿法研磨得到混合浆料；（3）以混合浆料为原料进行喷雾造粒，得到混合氧化物粉末；（4）进行压制成型，得到靶坯；（5）将靶坯依次进行脱脂烧结和两段式常压烧结，得氧化铟钛钽铈靶材，所述两段式常压烧结包括：升温至1400~1500℃，保温5~10h；降温至1320~1370℃，保温35~50h。本申请的靶材微观结构变得更加均匀，晶粒尺寸显著细化，显著提高了抗弯强度。
Preparation method of fine-grain high-strength indium titanium tantalum cerium oxide target material
The invention discloses a fine-grain high-strength indium titanium tantalum cerium oxide target material and a preparation method thereof. The preparation method comprises the following steps: (1) weighing indium oxide powder, titanium oxide powder, tantalum pentoxide powder and cerium oxide powder; (2) mixing and dispersing the weighed powder, a dispersing agent and a binding agent, and performing wet grinding to obtain mixed slurry; (3) carrying out spray granulation by taking the mixed slurry as a raw material to obtain mixed oxide powder; (4) carrying out compression molding to obtain a target blank; (5) the target blank is sequentially subjected to degreasing sintering and two-section type normal-pressure sintering, the indium titanium tantalum cerium oxide target material is obtained, and the two-section type normal-pressure sintering comprises the steps that the temperature is increased to 1400-1500 DEG C, and heat preservation is conducted for 5-10 h; and the temperature is reduced to 1320-1370 DEG C, and heat preservation is conducted for 35-50 h. The microstructure of the target material becomes more uniform, the grain size is remarkably refined, and the bending strength is remarkably improved.
本发明公开了一种细晶高强度的氧化铟钛钽铈靶材及其制备方法。制备方法包括以下步骤：（1）称取氧化铟粉末、氧化钛粉末、五氧化二钽粉末、氧化铈粉末；（2）将称取的粉末与分散剂、粘结剂混合分散，经过湿法研磨得到混合浆料；（3）以混合浆料为原料进行喷雾造粒，得到混合氧化物粉末；（4）进行压制成型，得到靶坯；（5）将靶坯依次进行脱脂烧结和两段式常压烧结，得氧化铟钛钽铈靶材，所述两段式常压烧结包括：升温至1400~1500℃，保温5~10h；降温至1320~1370℃，保温35~50h。本申请的靶材微观结构变得更加均匀，晶粒尺寸显著细化，显著提高了抗弯强度。
Preparation method of fine-grain high-strength indium titanium tantalum cerium oxide target material
一种细晶高强度氧化铟钛钽铈靶材的制备方法
ZHANG LIHAN (Autor:in) / XU TAO (Autor:in) / LU YANGJUN (Autor:in) / WANG HENGYU (Autor:in)
06.12.2024
Patent
Elektronische Ressource
Chinesisch
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