Preparation method of quartz crucible and quartz crucible: Fid-Bau Portal

Preparation method of quartz crucible and quartz crucible

ZHANG XIAOFU / WANG PENGFEI / QIU BOJIE / CHEN YANGJUN

The preparation method of the quartz crucible comprises the following steps that a crucible green body is prepared, the crucible green body comprises a first quartz sand layer and a second quartz sand layer which are sequentially arranged from outside to inside, and the second quartz sand layer comprises quartz sand and barium carbonate; the purity of the quartz sand in the first quartz sand layer is smaller than that of the quartz sand in the second quartz sand layer; the crucible green body is fired, and a crucible body is obtained; a protective coating is sprayed to the inner surface of a crucible body through inert gas, then gradient heating heat treatment is conducted after carbon dioxide gas is introduced, the quartz crucible is obtained, the quartz crucible comprises the crucible body and a protective layer located on the inner surface of the crucible body, and the protective layer comprises barium carbonate, nano silicon dioxide and barium borate. According to the preparation method of the quartz crucible, the binding force between the protective coating and the inner surface of the quartz crucible can be improved, the corrosion resistance of the quartz crucible is improved, and the service life of the quartz crucible is prolonged.

本申请涉及一种石英坩埚的制备方法及石英坩埚，石英坩埚的制备方法包括如下步骤：制备坩埚生胚，坩埚生胚包括由外至内依次设置的第一石英砂层及第二石英砂层，其中，第二石英砂层包括石英砂及碳酸钡，第一石英砂层中石英砂的纯度小于第二石英砂层中石英砂的纯度；对坩埚生胚进行烧制，得到坩埚本体；利用惰性气体将防护涂料喷涂至坩埚本体的内表面，再通入二氧化碳气体后进行梯度升温热处理，得到石英坩埚，石英坩埚包括坩埚本体及位于坩埚本体内表面的防护层，防护层包括碳酸钡、纳米二氧化硅和硼酸钡。本申请石英坩埚的制备方法，能够提高防护涂层与石英坩埚内表面的结合力，提高石英坩埚的耐腐蚀性和使用寿命。

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