Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Gallium magnesium doped zinc oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a gallium-magnesium-doped zinc oxide target material and a preparation method thereof.The preparation method of the gallium-magnesium-doped zinc oxide target material comprises the steps that 1, zinc oxide powder, gallium oxide powder and magnesium oxide powder are evenly mixed to obtain mixed powder; 2, the mixed powder is subjected to first-stage vacuum sintering; step 3, carrying out second-stage vacuum hot pressed sintering to obtain a gallium-magnesium doped zinc oxide target material; the particle size D90 of the zinc oxide powder is 3-4 [mu] m, and the particle size D90 of the gallium oxide powder and the magnesium oxide powder is 10-15 [mu] m; the total weight of the gallium oxide powder and the magnesium oxide powder is 1-5% of the weight of the mixed powder. By controlling the doping amount of gallium oxide and magnesium oxide, selecting the particle sizes of zinc oxide, magnesium oxide and gallium oxide and performing vacuum sintering for the first time in the step 2, the exhaust effect is improved, so that zinc oxide, magnesium oxide and gallium oxide with different particle sizes can be fully exhausted in the grain growth process, and the densification degree of the target material is improved.
本发明属于靶材制备技术领域，公开了一种镓镁掺杂的氧化锌靶材及其制备方法，该一种镓镁掺杂的氧化锌靶材的制备方法，包括：步骤1：将氧化锌粉末、氧化镓粉末、氧化镁粉末混合均匀得到混合粉末；步骤2：将混合粉末进行第一段真空烧结；步骤3：进行第二段真空热压烧结得到镓镁掺杂的氧化锌靶材；所述氧化锌粉末的粒径D90为3‑4μm，所述氧化镓粉末和氧化镁粉末的粒径D90为10‑15μm；所述氧化镓粉末和氧化镁粉末的总重量为混合粉末重量的1‑5％。本发明通过控制氧化镓和氧化镁的掺杂量、氧化锌、氧化镁、氧化镓的粒径选择，在步骤2第一次真空烧结来增大排气的效果，使不同粒径的氧化锌、氧化镁、氧化镓在晶粒生长过程中能够充分排气，提高靶材的致密化程度。
Gallium magnesium doped zinc oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a gallium-magnesium-doped zinc oxide target material and a preparation method thereof.The preparation method of the gallium-magnesium-doped zinc oxide target material comprises the steps that 1, zinc oxide powder, gallium oxide powder and magnesium oxide powder are evenly mixed to obtain mixed powder; 2, the mixed powder is subjected to first-stage vacuum sintering; step 3, carrying out second-stage vacuum hot pressed sintering to obtain a gallium-magnesium doped zinc oxide target material; the particle size D90 of the zinc oxide powder is 3-4 [mu] m, and the particle size D90 of the gallium oxide powder and the magnesium oxide powder is 10-15 [mu] m; the total weight of the gallium oxide powder and the magnesium oxide powder is 1-5% of the weight of the mixed powder. By controlling the doping amount of gallium oxide and magnesium oxide, selecting the particle sizes of zinc oxide, magnesium oxide and gallium oxide and performing vacuum sintering for the first time in the step 2, the exhaust effect is improved, so that zinc oxide, magnesium oxide and gallium oxide with different particle sizes can be fully exhausted in the grain growth process, and the densification degree of the target material is improved.
本发明属于靶材制备技术领域，公开了一种镓镁掺杂的氧化锌靶材及其制备方法，该一种镓镁掺杂的氧化锌靶材的制备方法，包括：步骤1：将氧化锌粉末、氧化镓粉末、氧化镁粉末混合均匀得到混合粉末；步骤2：将混合粉末进行第一段真空烧结；步骤3：进行第二段真空热压烧结得到镓镁掺杂的氧化锌靶材；所述氧化锌粉末的粒径D90为3‑4μm，所述氧化镓粉末和氧化镁粉末的粒径D90为10‑15μm；所述氧化镓粉末和氧化镁粉末的总重量为混合粉末重量的1‑5％。本发明通过控制氧化镓和氧化镁的掺杂量、氧化锌、氧化镁、氧化镓的粒径选择，在步骤2第一次真空烧结来增大排气的效果，使不同粒径的氧化锌、氧化镁、氧化镓在晶粒生长过程中能够充分排气，提高靶材的致密化程度。
Gallium magnesium doped zinc oxide target material and preparation method thereof
一种镓镁掺杂的氧化锌靶材及其制备方法
YU FANG (Autor:in) / TONG PEIYUN (Autor:in) / ZHU LIU (Autor:in)
27.12.2024
Patent
Elektronische Ressource
Chinesisch
Gallium-doped zinc oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Gallium-zinc-doped tin oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Zinc magnesium oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Preparation method of indium gallium zinc oxide target material
| Europäisches Patentamt | 2022
Preparation method of indium gallium zinc oxide target material
| Europäisches Patentamt | 2021