Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-dielectric high-breakdown-strength electrostatic chuck and preparation method thereof
The invention relates to a high-dielectric high-breakdown-strength electrostatic chuck and a preparation method thereof. The electrostatic chuck comprises a ceramic dielectric layer, a bonding layer and a metal base which are sequentially arranged from top to bottom, the ceramic dielectric layer comprises at least one ceramic dielectric layer, and raw materials of the ceramic dielectric layer comprise at least one of aluminum oxide and aluminum nitride and at least one of barium titanate, barium zirconate titanate, lead magnesium niobate and barium strontium titanate. According to the electrostatic chuck, the electrostatic adsorption technology is utilized, efficient electrostatic adsorption is achieved through a high-dielectric-constant ceramic dielectric layer material, and the high-dielectric-constant material can effectively store charges, so that the electrostatic adsorption force is enhanced, and workpieces such as wafers and the like keep better stability and precision in the machining process; and the ceramic dielectric layer material has high breakdown strength, so that the working safety of the electrostatic chuck in a high-voltage environment can be ensured. The preparation method is convenient to control, high in production efficiency and beneficial to large-scale production.
本发明涉及一种高介电高击穿强度的静电卡盘及其制备方法。所述静电卡盘包括由上至下依次设置的陶瓷介质层、粘结层和金属基座，所述陶瓷介质层包括至少一个陶瓷介电层，所述陶瓷介电层的原料包括氧化铝和氮化铝中的至少一种，并包括钛酸钡、锆钛酸钡、铌镁酸铅和钛酸锶钡中的至少一种。所述静电卡盘利用静电吸附技术，通过高介电常数的陶瓷介电层材料实现高效的静电吸附，高介电常数材料能够有效地存储电荷，从而增强静电吸附力，使得晶圆等工件在加工过程中保持更好的稳定性和精度，且陶瓷介电层材料具有高击穿强度，有利于保证静电卡盘在高压环境下工作的安全性。所述制备方法控制方便，生产效率高，有利于规模化生产。
High-dielectric high-breakdown-strength electrostatic chuck and preparation method thereof
The invention relates to a high-dielectric high-breakdown-strength electrostatic chuck and a preparation method thereof. The electrostatic chuck comprises a ceramic dielectric layer, a bonding layer and a metal base which are sequentially arranged from top to bottom, the ceramic dielectric layer comprises at least one ceramic dielectric layer, and raw materials of the ceramic dielectric layer comprise at least one of aluminum oxide and aluminum nitride and at least one of barium titanate, barium zirconate titanate, lead magnesium niobate and barium strontium titanate. According to the electrostatic chuck, the electrostatic adsorption technology is utilized, efficient electrostatic adsorption is achieved through a high-dielectric-constant ceramic dielectric layer material, and the high-dielectric-constant material can effectively store charges, so that the electrostatic adsorption force is enhanced, and workpieces such as wafers and the like keep better stability and precision in the machining process; and the ceramic dielectric layer material has high breakdown strength, so that the working safety of the electrostatic chuck in a high-voltage environment can be ensured. The preparation method is convenient to control, high in production efficiency and beneficial to large-scale production.
本发明涉及一种高介电高击穿强度的静电卡盘及其制备方法。所述静电卡盘包括由上至下依次设置的陶瓷介质层、粘结层和金属基座，所述陶瓷介质层包括至少一个陶瓷介电层，所述陶瓷介电层的原料包括氧化铝和氮化铝中的至少一种，并包括钛酸钡、锆钛酸钡、铌镁酸铅和钛酸锶钡中的至少一种。所述静电卡盘利用静电吸附技术，通过高介电常数的陶瓷介电层材料实现高效的静电吸附，高介电常数材料能够有效地存储电荷，从而增强静电吸附力，使得晶圆等工件在加工过程中保持更好的稳定性和精度，且陶瓷介电层材料具有高击穿强度，有利于保证静电卡盘在高压环境下工作的安全性。所述制备方法控制方便，生产效率高，有利于规模化生产。
High-dielectric high-breakdown-strength electrostatic chuck and preparation method thereof
一种高介电高击穿强度的静电卡盘及其制备方法
CHEN WENJIE (Autor:in) / CHEN GUANLIANG (Autor:in) / CHANG XINFENG (Autor:in) / LI GUOMING (Autor:in) / LAN JIANHUI (Autor:in)
27.12.2024
Patent
Elektronische Ressource
Chinesisch
Electrostatic chuck dielectric layer and electrostatic chuck
Europäisches Patentamt | 2020
Dielectric layer for electrostatic chuck and electrostatic chuck
| Europäisches Patentamt | 2015