Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SILICON NITRIDE SUBSTRATE AND SILICON NITRIDE CIRCUIT BOARD
A silicon nitride substrate which comprises a silicon nitride sintered body comprising silicon nitride crystal particles and a grain boundary phase, wherein the silicon nitride substrate being characterized by having a thickness of 0.4 mm or less, and also characterized in that, in an arbitrary cross section of the silicon nitride sintered body or the surface of the silicon nitride sintered body, the number-based percentage of silicon nitride crystal particles each having a dislocation defect part therein in silicon nitride crystal particles present in a unit area having a size of 10 µm × 10 µm is 0 to 20% inclusive. It becomes possible to improve etching resistance during the manufacture of a circuit board from the silicon nitride substrate.
SILICON NITRIDE SUBSTRATE AND SILICON NITRIDE CIRCUIT BOARD
A silicon nitride substrate which comprises a silicon nitride sintered body comprising silicon nitride crystal particles and a grain boundary phase, wherein the silicon nitride substrate being characterized by having a thickness of 0.4 mm or less, and also characterized in that, in an arbitrary cross section of the silicon nitride sintered body or the surface of the silicon nitride sintered body, the number-based percentage of silicon nitride crystal particles each having a dislocation defect part therein in silicon nitride crystal particles present in a unit area having a size of 10 µm × 10 µm is 0 to 20% inclusive. It becomes possible to improve etching resistance during the manufacture of a circuit board from the silicon nitride substrate.
SILICON NITRIDE SUBSTRATE AND SILICON NITRIDE CIRCUIT BOARD
SILICIUMNITRIDSUBSTRAT UND SILICIUMNITRIDLEITERPLATTE
SUBSTRAT DE NITRURE DE SILICIUM ET CARTE DE CIRCUIT IMPRIMÉ DE NITRURE DE SILICIUM
AOKI KATSUYUKI (Autor:in) / FUKASAWA TAKAYUKI (Autor:in) / MOMMA JUN (Autor:in) / IWAI KENTARO (Autor:in)
11.05.2022
Patent
Elektronische Ressource
Englisch
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