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A platform for research: civil engineering, architecture and urbanism
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE BODY
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE BODY
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE BODY
PLASMABESTÄNDIGER YTTRIUM-ALUMINIUMOXID-KÖRPER
CORPS D'OXYDE D'YTTRIUM-ALUMINIUM RÉSISTANT AU PLASMA
WALKER LUKE (author) / BISTA SAURAV (author) / DONELON MATTHEW JOSEPH (author) / KENNEDY STEVEN ROGER (author)
2022-09-28
Patent
Electronic Resource
English
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