Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK, AND ELECTROSTATIC CHUCK USING THE SAME
PROBLEM TO BE SOLVED: To provide a ceramic composition for an electrostatic chuck, and an electrostatic chuck using the same.SOLUTION: Provided is an electrostatic chuck containing the first ceramic layer 10 formed of a ceramic composition including the first ceramic powder and the first conductive powder. The first ceramic layer 10 may have low specific resistance, thus the electrostatic adsorption power of the electrostatic chuck can be improved. The electrostatic chuck composed of: the first ceramic layer 10; an electrode 20 produced with the first conductive powder; and the second ceramic layer 30 including the second ceramic powder, the second conductive powder and glass is shown in figure 1.SELECTED DRAWING: Figure 1
【課題】静電チャック用セラミック組成物、これを用いた静電チャックに関する。【解決手段】静電チャックは、第１セラミック粉末及び第１導電性粉末を含むセラミック組成物で形成された第１セラミック層１０を含む。だい１セラミック層１０は低い比抵抗を有することができ、これにより、静電チャックの静電吸着力を向上させることができる。第１セラミック層１０と、第１導電性粉末で作製した電極２０、その上に第２セラミック粉末、第２導電性粉末、及びガラスを含む第２セラミック層３０で構成される静電チャックを図１に示す。【選択図】図１
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK, AND ELECTROSTATIC CHUCK USING THE SAME
PROBLEM TO BE SOLVED: To provide a ceramic composition for an electrostatic chuck, and an electrostatic chuck using the same.SOLUTION: Provided is an electrostatic chuck containing the first ceramic layer 10 formed of a ceramic composition including the first ceramic powder and the first conductive powder. The first ceramic layer 10 may have low specific resistance, thus the electrostatic adsorption power of the electrostatic chuck can be improved. The electrostatic chuck composed of: the first ceramic layer 10; an electrode 20 produced with the first conductive powder; and the second ceramic layer 30 including the second ceramic powder, the second conductive powder and glass is shown in figure 1.SELECTED DRAWING: Figure 1
【課題】静電チャック用セラミック組成物、これを用いた静電チャックに関する。【解決手段】静電チャックは、第１セラミック粉末及び第１導電性粉末を含むセラミック組成物で形成された第１セラミック層１０を含む。だい１セラミック層１０は低い比抵抗を有することができ、これにより、静電チャックの静電吸着力を向上させることができる。第１セラミック層１０と、第１導電性粉末で作製した電極２０、その上に第２セラミック粉末、第２導電性粉末、及びガラスを含む第２セラミック層３０で構成される静電チャックを図１に示す。【選択図】図１
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK, AND ELECTROSTATIC CHUCK USING THE SAME
静電チャック用セラミック組成物、これを用いた静電チャック
CHOO HO SUNG (Autor:in) / NAKAZAWA HIDEJI (Autor:in) / WOO SEOK KYOON (Autor:in)
09.02.2017
Patent
Elektronische Ressource
Japanisch
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