Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ALUMINA SINTERED BODY AND ELECTROSTATIC CHUCK
To provide an alumina sintered body that can be fired in the atmosphere, is virtually free of elements having a high burden on living organisms and environment, exhibits a black or dark gray color, and has low resistance, and an electrostatic chuck using the alumina sintered body.SOLUTION: The alumina sintered body contains Al2O3 of 85 mass% or more, in which Fe of 0.7 mass% or more and 6.6 mass% or less in terms of Fe2O3, Ti of 1 mass% or more and 5 mass% or less in terms of TiO2, Si of 1 mass% or more and to 5 mass% or less in terms of SiO2, and Y of 0.1 mass% or more and 9 mass% or less in terms of Y2O3 are contained. And the alumina sintered body is used as a placing plate 1 in the electrostatic chuck.SELECTED DRAWING: Figure 1
【課題】大気雰囲気下で焼成可能で、生体及び環境負荷の高い元素を実質的に含まず、黒色又は濃灰色を呈し、かつ低抵抗なアルミナ焼結体及びそのアルミナ焼結体を用いた静電チャックを提供する。【解決手段】Ａｌ２Ｏ３の含有率が８５質量％以上であるアルミナ焼結体であって、ＦｅをＦｅ２Ｏ３換算で０．７質量％以上６．６質量％以下、ＴｉをＴｉＯ２換算で１質量％以上５質量％以下、ＳｉをＳｉＯ２換算で１質量％以上５質量％以下、ＹをＹ２Ｏ３換算で０．１質量％以上９質量％以下含有する。このアルミナ焼結体を静電チャックにおいて載置板１に使用する。【選択図】図１
ALUMINA SINTERED BODY AND ELECTROSTATIC CHUCK
To provide an alumina sintered body that can be fired in the atmosphere, is virtually free of elements having a high burden on living organisms and environment, exhibits a black or dark gray color, and has low resistance, and an electrostatic chuck using the alumina sintered body.SOLUTION: The alumina sintered body contains Al2O3 of 85 mass% or more, in which Fe of 0.7 mass% or more and 6.6 mass% or less in terms of Fe2O3, Ti of 1 mass% or more and 5 mass% or less in terms of TiO2, Si of 1 mass% or more and to 5 mass% or less in terms of SiO2, and Y of 0.1 mass% or more and 9 mass% or less in terms of Y2O3 are contained. And the alumina sintered body is used as a placing plate 1 in the electrostatic chuck.SELECTED DRAWING: Figure 1
【課題】大気雰囲気下で焼成可能で、生体及び環境負荷の高い元素を実質的に含まず、黒色又は濃灰色を呈し、かつ低抵抗なアルミナ焼結体及びそのアルミナ焼結体を用いた静電チャックを提供する。【解決手段】Ａｌ２Ｏ３の含有率が８５質量％以上であるアルミナ焼結体であって、ＦｅをＦｅ２Ｏ３換算で０．７質量％以上６．６質量％以下、ＴｉをＴｉＯ２換算で１質量％以上５質量％以下、ＳｉをＳｉＯ２換算で１質量％以上５質量％以下、ＹをＹ２Ｏ３換算で０．１質量％以上９質量％以下含有する。このアルミナ焼結体を静電チャックにおいて載置板１に使用する。【選択図】図１
ALUMINA SINTERED BODY AND ELECTROSTATIC CHUCK
アルミナ焼結体及び静電チャック
NAKAMURA KIICHIRO (Autor:in)
08.02.2024
Patent
Elektronische Ressource
Japanisch
ELECTROSTATIC CHUCK ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOF
| Europäisches Patentamt | 2022