Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ALUMINA-BASED SINTERED BODY AND ELECTROSTATIC CHUCK
In an alumina-based sintered body containing alumina (Al2O3) as a main component and containing magnesia (MgO) whose content with respect to a content of the alumina is 0.00 mol %
ALUMINA-BASED SINTERED BODY AND ELECTROSTATIC CHUCK
In an alumina-based sintered body containing alumina (Al2O3) as a main component and containing magnesia (MgO) whose content with respect to a content of the alumina is 0.00 mol %
ALUMINA-BASED SINTERED BODY AND ELECTROSTATIC CHUCK
HOTTA MOTOKI (Autor:in) / MATSUOKA TAKAYUKI (Autor:in) / OGAWA TAKAMICHI (Autor:in)
12.12.2024
Patent
Elektronische Ressource
Englisch
ELECTROSTATIC CHUCK ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOF
| Europäisches Patentamt | 2022