Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ELECTROSTATIC CHUCK ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOF
The present invention provides an alumina sintered body. In one embodiment, the alumina sintered body includes: coarse powder of which the diameter is in a range of 150 to 300 nm; and nanopowder of which the diameter is 100 nm or less. According to one embodiment of the present invention, a high-density pure alumina sintered body can be obtained.
본 발명은 알루미나 소결체를 제공한다. 일 실시 예에 있어서, 알루미나 소결체는, 150nm 내지 300nm의 직경을 갖는 조대 분말과; 100nm 이하의 나노 분말을 포함한다.
ELECTROSTATIC CHUCK ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOF
The present invention provides an alumina sintered body. In one embodiment, the alumina sintered body includes: coarse powder of which the diameter is in a range of 150 to 300 nm; and nanopowder of which the diameter is 100 nm or less. According to one embodiment of the present invention, a high-density pure alumina sintered body can be obtained.
본 발명은 알루미나 소결체를 제공한다. 일 실시 예에 있어서, 알루미나 소결체는, 150nm 내지 300nm의 직경을 갖는 조대 분말과; 100nm 이하의 나노 분말을 포함한다.
ELECTROSTATIC CHUCK ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOF
정전척, 알루미나 소결체 및 그의 제조 방법
CHOI SUNG MIN (Autor:in) / PARK JONG SUNG (Autor:in)
14.12.2022
Patent
Elektronische Ressource
Koreanisch