A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CaF2 POLYCRYSTALLINE CaF2 MEMBER MEMBER FOR PLASMA TREATMENT DEVICE PLASMA TREATMENT DEVICE AND PROCESS FOR PRODUCING FOCUSING RING
다결정 CaF부재는 CaF로 이루어지는 복수의 다결정체를 압착한 조합체로 이루어진다.
CaF2 POLYCRYSTALLINE CaF2 MEMBER MEMBER FOR PLASMA TREATMENT DEVICE PLASMA TREATMENT DEVICE AND PROCESS FOR PRODUCING FOCUSING RING
다결정 CaF부재는 CaF로 이루어지는 복수의 다결정체를 압착한 조합체로 이루어진다.
CaF2 POLYCRYSTALLINE CaF2 MEMBER MEMBER FOR PLASMA TREATMENT DEVICE PLASMA TREATMENT DEVICE AND PROCESS FOR PRODUCING FOCUSING RING
다결정 CaF2 부재, 플라즈마 처리 장치용 부재, 플라즈마 처리 장치 및 포커스 링의 제조 방법
2019-12-24
Patent
Electronic Resource
Korean
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
| European Patent Office | 2018
| European Patent Office | 2017
CaF2 translucent ceramics and manufacturing method of CaF2 translucent ceramics
| European Patent Office | 2017
PLASMA RESISTANT MEMBER, PLASMA TREATMENT DEVICE COMPONENT, AND PLASMA TREATMENT DEVICE
| European Patent Office | 2023
MEMBER FOR PLASMA TREATMENT DEVICES, AND PLASMA TREATMENT DEVICE
| European Patent Office | 2020