NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT: Fid-Bau Portal

NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU

Abstract

본 발명은 NbO(2

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NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU

Abstract

본 발명은 NbO(2

NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU

Abstract

본 발명은 NbO(2

Zugriff

Download

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Ähnliche Titel

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Titel:

NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

Weitere Titelangaben:

니오븀 산화물 소결체 및 해당 소결체로 이루어지는 스퍼터링 타깃, 그리고 니오븀 산화물 소결체의 제조 방법

Beteiligte:

NARITA SATOYASU (Autor:in)

Erscheinungsdatum:

14.06.2017

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Koreanisch

Klassifikation:

IPC: C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL

Europäisches Patentamt | 2018

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NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET COMPRISING SINTERED COMPACT, AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

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NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU | Europäisches Patentamt | 2017

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Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact

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Oxide sintered compact and sputtering target formed from said oxide sintered compact

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