Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact: Fid-Bau Portal

Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact

NARITA SATOYASU

Abstract

The present invention provides a niobium oxide sintered compact having a composition of NbOx (2

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Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact

NARITA SATOYASU

Abstract

The present invention provides a niobium oxide sintered compact having a composition of NbOx (2

Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact

NARITA SATOYASU

Abstract

The present invention provides a niobium oxide sintered compact having a composition of NbOx (2

Zugriff

Download

Seitennavigation

Dokumentinformationen

Ähnliche Titel

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Dokumentinformationen

Titel:

Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact

Beteiligte:

NARITA SATOYASU (Autor:in)

Erscheinungsdatum:

17.03.2020

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Englisch

Klassifikation:

IPC: H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / H10N

NARITA SATOYASU | Europäisches Patentamt | 2017

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NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

Europäisches Patentamt | 2018

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NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU | Europäisches Patentamt | 2017

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NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET COMPRISING SINTERED COMPACT, AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU | Europäisches Patentamt | 2016

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Oxide sintered compact and sputtering target formed from said oxide sintered compact

YAMAGUCHI YOHEI / KURIHARA TOSHIYA / KAKUTA KOJI | Europäisches Patentamt | 2018

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