NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT: Fid-Bau Portal

NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU

Abstract

The present invention provides a niobium oxide sintered compact having a composition of NbOx (2

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NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU

Abstract

The present invention provides a niobium oxide sintered compact having a composition of NbOx (2

NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT

NARITA SATOYASU

Abstract

The present invention provides a niobium oxide sintered compact having a composition of NbOx (2

Zugriff

Download

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT

Beteiligte:

NARITA SATOYASU (Autor:in)

Erscheinungsdatum:

26.10.2017

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Englisch

Klassifikation:

IPC: H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / H10N

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NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET COMPRISING SINTERED COMPACT, AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT

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Oxide sintered compact and sputtering target formed from said oxide sintered compact

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