Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Ceramic substrate and susceptor
A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.
Ceramic substrate and susceptor
A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.
Ceramic substrate and susceptor
KOSAKAI MAMORU (Autor:in) / HIDAKA NOBUHIRO (Autor:in) / KIMURA NAOTO (Autor:in) / KUGIMOTO HIRONORI (Autor:in)
10.01.2023
Patent
Elektronische Ressource
Englisch