Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
DIELECTRIC FOR ELECTROSTATIC CHUCK
Provided is a dielectric for an electrostatic chuck, which is capable of ensuring sufficient hardness, while ensuring basic properties, such as intrinsic volume resistivity, required for a dielectric for a Johnson-Rahbek type electrostatic chuck. The dielectric has a main crystal phase consisting of corundum, wherein the dielectric includes Al5BO9 as another crystal phase, and wherein a ratio IA/IB, where IA denotes a (021) peak intensity of Al5BO9 as measured by powder X-ray diffraction, and IB denotes a (012) peak intensity of corundum as measured by powder X-ray diffraction, is in the range of 0.04 to 0.4.
DIELECTRIC FOR ELECTROSTATIC CHUCK
Provided is a dielectric for an electrostatic chuck, which is capable of ensuring sufficient hardness, while ensuring basic properties, such as intrinsic volume resistivity, required for a dielectric for a Johnson-Rahbek type electrostatic chuck. The dielectric has a main crystal phase consisting of corundum, wherein the dielectric includes Al5BO9 as another crystal phase, and wherein a ratio IA/IB, where IA denotes a (021) peak intensity of Al5BO9 as measured by powder X-ray diffraction, and IB denotes a (012) peak intensity of corundum as measured by powder X-ray diffraction, is in the range of 0.04 to 0.4.
DIELECTRIC FOR ELECTROSTATIC CHUCK
HATTORI KENSAKU (Autor:in)
18.05.2023
Patent
Elektronische Ressource
Englisch
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