Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Oxide sintered compact, its production method, and raw material powder for producing oxide sintered compact
An oxide sintered compact made of indium (In), gallium (Ga), zinc (Zn) and oxygen (O) and represented by a formula of InxGayZnzOa [wherein x/(x+y) is 0.2 to 0.8, z/(x+y+z) is 0.1 to 0.5, and a=(3/2)x+(3/2)y+z], wherein the concentration of volatile impurities contained in the oxide sintered compact is 20 ppm or less. Provided is technology for application to the production of an IGZO target capable of achieving high densification and low bulk resistance of the sputtering target, preventing swelling and cracks of the target during the production process, minimizing the generation of nodules, inhibiting abnormal discharge, and enabling DC sputtering.
Oxide sintered compact, its production method, and raw material powder for producing oxide sintered compact
An oxide sintered compact made of indium (In), gallium (Ga), zinc (Zn) and oxygen (O) and represented by a formula of InxGayZnzOa [wherein x/(x+y) is 0.2 to 0.8, z/(x+y+z) is 0.1 to 0.5, and a=(3/2)x+(3/2)y+z], wherein the concentration of volatile impurities contained in the oxide sintered compact is 20 ppm or less. Provided is technology for application to the production of an IGZO target capable of achieving high densification and low bulk resistance of the sputtering target, preventing swelling and cracks of the target during the production process, minimizing the generation of nodules, inhibiting abnormal discharge, and enabling DC sputtering.
Oxide sintered compact, its production method, and raw material powder for producing oxide sintered compact
IKISAWA MASAKATSU (Autor:in) / YAHAGI MASATAKA (Autor:in) / OSADA KOZO (Autor:in) / KAKENO TAKASHI (Autor:in) / TAKAMI HIDEO (Autor:in)
30.05.2017
Patent
Elektronische Ressource
Englisch
| Europäisches Patentamt | 2016
| Europäisches Patentamt | 2020
| Europäisches Patentamt | 2017
OXIDE SINTERED COMPACT, SPUTTERING TARGET, THIN FILM AND METHOD OF PRODUCING OXIDE SINTERED COMPACT
| Europäisches Patentamt | 2016
OXIDE SINTERED COMPACT SPUTTERING TARGET THIN FILM AND METHOD OF PRODUCING OXIDE SINTERED COMPACT
Europäisches Patentamt | 2017