Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Fabricated poly-Si thin film transistor with anodizing Al film using nanoindentation
This letter reports the fabrication of polycrystalline silicon thin-film transistors (poly-Si TFT) on glass substrates using Al oxide films by anodizing. The a-Si films were deposited with mixture gas of argon and helium to minimize the argon incorporation into the film. The a-Si films were then laser crystallized using XeCl excimer laser irradiation and a fourmask- processed poly-Si TFTs were fabricated with fully selfaligned top gate structure.
Fabricated poly-Si thin film transistor with anodizing Al film using nanoindentation
This letter reports the fabrication of polycrystalline silicon thin-film transistors (poly-Si TFT) on glass substrates using Al oxide films by anodizing. The a-Si films were deposited with mixture gas of argon and helium to minimize the argon incorporation into the film. The a-Si films were then laser crystallized using XeCl excimer laser irradiation and a fourmask- processed poly-Si TFTs were fabricated with fully selfaligned top gate structure.
Fabricated poly-Si thin film transistor with anodizing Al film using nanoindentation
Jin-Woo Han, (Autor:in) / Jong-Yeon Kim, (Autor:in) / Hee-Jin Kan, (Autor:in) / Hyun-Chan Moon, (Autor:in) / Seong-Ho Choi, (Autor:in) / Kwang-Bum Park, (Autor:in) / Tae-Ha Kim, (Autor:in) / Dae-Shik Seo, (Autor:in)
01.10.2006
333396 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
OXIDE SEMICONDUCTOR THIN FILM OF THIN FILM TRANSISTOR, THIN FILM TRANSISTOR AND SPUTTERING TARGET
| Europäisches Patentamt | 2016
OXIDE SEMICONDUCTOR THIN FILM OF THIN FILM TRANSISTOR, THIN FILM TRANSISTOR AND SPUTTERING TARGET
| Europäisches Patentamt | 2016
Nanoindentation of a 10 nm thick thin film
| British Library Online Contents | 1999
Nanoindentation simulation of coated aluminum thin film using quasicontinuum method
| British Library Online Contents | 2016
Using Nanoindentation and Nanoscratch to Determine Thin Film Mechanical Properties
| British Library Online Contents | 2006