Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Materials & Process Integration for MEMS
This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications). MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. The development of micro-mechanical systems (MEMS) foreshadows momentous changes not only in the technology world, but in virtually every aspect of human life
Materials & Process Integration for MEMS
This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications). MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. The development of micro-mechanical systems (MEMS) foreshadows momentous changes not only in the technology world, but in virtually every aspect of human life
Materials & Process Integration for MEMS
Tay, Francis E. H. (Autor:in)
2002
Online-Ressource (XIX, 299 p)
digital
Buch
Elektronische Ressource
Englisch
DDC:
620.11
Materials & Process Integration for MEMS
| TIBKAT | 2002
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