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Influence of different hydrocarbons on the structure of CVD-and PACVD-TiC~x hard layers

Leonhardt, A. / Wolf, E.

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Influence of different hydrocarbons on the structure of CVD-and PACVD-TiC~x hard layers

Leonhardt, A. / Wolf, E.

Influence of different hydrocarbons on the structure of CVD-and PACVD-TiC~x hard layers

Leonhardt, A. / Wolf, E.

Access

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Influence of different hydrocarbons on the structure of CVD-and PACVD-TiC~x hard layers

Contributors:

Leonhardt, A. (author) / Wolf, E. (author) / Sarin, V. K.

Published in:

Proceedings of the 5th International Conference on the Science of Hard Materials ; 389-393

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 209

Publication date:

1996-01-01

Size:

5 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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