Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Effects of nitrogen plasma immersion ion implantation in silicon [4468-16]
Effects of nitrogen plasma immersion ion implantation in silicon [4468-16]
Effects of nitrogen plasma immersion ion implantation in silicon [4468-16]
Rajkumar (Autor:in) / Kumar, M. (Autor:in) / George, P. J. (Autor:in) / Chari, K. S. (Autor:in) / Mukherjee, S. (Autor:in) / Knystautas, E. J. / Kirk, W. P. / Browning, V. / International Society for Optical Engineering
Conference, Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing ; 2001 ; San Diego, CA
01.01.2001
9 pages
Aufsatz (Konferenz)
Englisch
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