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    Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

    New search for: Liu, Z.
    New search for: Li, H.
    New search for: Schmidt, R.
    New search for: Baker, R.
    New search for: Fujimoto, S.
    New search for: Hashimoto, K.

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    Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

    New search for: Liu, Z.
    New search for: Li, H.
    New search for: Schmidt, R.
    New search for: Baker, R.
    New search for: Fujimoto, S.
    New search for: Hashimoto, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

    New search for: Liu, Z.
    New search for: Li, H.
    New search for: Schmidt, R.
    New search for: Baker, R.
    New search for: Fujimoto, S.
    New search for: Hashimoto, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

    Contributors:

    Liu, Z. (author) / Li, H. (author) / Schmidt, R. (author) / Baker, R. (author) / Fujimoto, S. / Hashimoto, K. / Electrochemical Society

    Conference:

    SYMPOSIUM, Corrosion and electrochemistry of advanced materials, in honor of Koji Hashimoto ; 2005 ; Los Angeles, CA

    Published in:

    Corrosion and electrochemistry of advanced materials, in honor of Koji Hashimoto ; 465-478

    ECS TRANSACTIONS ; 1

    Publication date:

    2006-01-01

    Size:

    14 pages

    Remarks:

    Includes bibliographical references and index; Held at the 208th meeting of the Electrochemical Society

    ISBN:

    9781566774970 , 1566774977

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    Corrosion and anti-corrosives , Amorphous substances , Nanostructured materials , Corrosion resistant alloys , Electrochemistry , Advanced materials

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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