Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Environment friendly chemical mechanical polishing of copper

    New search for: Zhang, Zhenyu
    New search for: Cui, Junfeng
    New search for: Zhang, Jiabo
    New search for: Liu, Dongdong
    New search for: Yu, Zhijian
    New search for: Guo, Dongming

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Environment friendly chemical mechanical polishing of copper

    New search for: Zhang, Zhenyu
    New search for: Cui, Junfeng
    New search for: Zhang, Jiabo
    New search for: Liu, Dongdong
    New search for: Yu, Zhijian
    New search for: Guo, Dongming

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Environment friendly chemical mechanical polishing of copper

    New search for: Zhang, Zhenyu
    New search for: Cui, Junfeng
    New search for: Zhang, Jiabo
    New search for: Liu, Dongdong
    New search for: Yu, Zhijian
    New search for: Guo, Dongming

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Environment friendly chemical mechanical polishing of copper

    Contributors:

    Zhang, Zhenyu (author) / Cui, Junfeng (author) / Zhang, Jiabo (author) / Liu, Dongdong (author) / Yu, Zhijian (author) / Guo, Dongming (author)

    Published in:

    Applied surface science ; 467 ; 5-11

    Publication date:

    2019-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Characteristics in chemical-mechanical polishing of copper: comparison of polishing pads

    Stavreva, Z. / Zeidler, D. / Ploetner, M. et al. | British Library Online Contents | 1997

    Environmentally - Friendly Chemical Polishing and Passivation Process for Copper and Its Alloys

    Lv, X.-f. / Li, S.-y. | British Library Online Contents | 2006

    Environmental Friendly Chemical Polishing and Passivating Technology of Copper and Its Alloys

    Shi, L. / Wnag, S.-l. / Wu, D. | British Library Online Contents | 2003

    Chemical mechanical polishing of copper for multilevel metallization

    Stavreva, Z. / Zeidler, D. / Ploetner, M. et al. | British Library Online Contents | 1996

    Chemical-mechanical polishing of copper using molybdenum dioxide slurry

    Hegde, S. / Patri, U. B. / Babu, S. V. | British Library Online Contents | 2005

    Back to top