The Structure and Thermal Properties of ZrAlYN Films Deposited by Magnetron Sputtering

Xian, G. (author) / Zhao, H.B. (author) / Fan, H.Y. (author) / Du, H. (author) / Liu, H. W.

International conference; 1st, Advanced engineering materials and architecture science; Materials science, civil engineering and architecture science, mechanical engineering and manufacturing technology: (ICAEMAS 2014) ; 2014 ; Xi'an, China

Advanced engineering materials and architecture science; Materials science, civil engineering and architecture science, mechanical engineering and manufacturing technology: (ICAEMAS 2014) ; 9-13

APPLIED MECHANICS AND MATERIALS ; 488/489 part 1

2014-01-01

5 pages

Includes bibliographical references and indexes.

3037859768 , 9783037859766

1660-9336

Conference paper

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English

Materials science , Civil engineering , Architecture , Mechanical engineering , Manufacturing processes , ICAEMAS