High depth resolution depth profiling of metal films using SIMS and sample rotation

Sykes, D. E. / Chew, A. / Hems, J. et al. | British Library Online Contents | 1996

High depth resolution depth profiling of metal films using SIMS and sample rotation

Sykes, D. E. / Chew, A. / Hems, J. et al. | British Library Online Contents | 1996

Narrow surface transient and high depth resolution SIMS using 250eV O2+

Chanbasha, A. R. / Wee, A. T. | British Library Online Contents | 2006

Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model

Takano, A. / Homma, Y. / Higashi, Y. et al. | British Library Online Contents | 2003

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003