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    Contactless electromodulation for in-situ characterization of semiconductor processing

    New search for: Yin, X.
    New search for: Guo, X.
    New search for: Pollak, F. H.
    New search for: Pettit, G. D.

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    Contactless electromodulation for in-situ characterization of semiconductor processing

    New search for: Yin, X.
    New search for: Guo, X.
    New search for: Pollak, F. H.
    New search for: Pettit, G. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Contactless electromodulation for in-situ characterization of semiconductor processing

    New search for: Yin, X.
    New search for: Guo, X.
    New search for: Pollak, F. H.
    New search for: Pettit, G. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Contactless electromodulation for in-situ characterization of semiconductor processing

    Contributors:

    Yin, X. (author) / Guo, X. (author) / Pollak, F. H. (author) / Pettit, G. D. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 63 ; 163

    Publication date:

    1993-01-01

    Size:

    163 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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