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Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. / Tong, K. Y.

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Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. / Tong, K. Y.

Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. / Tong, K. Y.

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Document information

Title:

Excimer-laser doping of spin-on dopant in silicon

Contributors:

Wong, Y. W. (author) / Yang, X. Q. (author) / Chan, P. W. (author) / Tong, K. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 64 ; 259

Publication date:

1993-01-01

Size:

259 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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