Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication: Fid-Bau Portal

Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication

Coutanson, S. / Fogarassy, E. / Venturini, J.

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Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication

Coutanson, S. / Fogarassy, E. / Venturini, J.

Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication

Coutanson, S. / Fogarassy, E. / Venturini, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication

Contributors:

Coutanson, S. (author) / Fogarassy, E. (author) / Venturini, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 4502-4505

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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