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Excimer laser doping techniques for II-VI semiconductors

Hatanaka, Y. / Niraula, M. / Nakamura, A. / Aoki, T.

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Excimer laser doping techniques for II-VI semiconductors

Hatanaka, Y. / Niraula, M. / Nakamura, A. / Aoki, T.

Excimer laser doping techniques for II-VI semiconductors

Hatanaka, Y. / Niraula, M. / Nakamura, A. / Aoki, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excimer laser doping techniques for II-VI semiconductors

Contributors:

Hatanaka, Y. (author) / Niraula, M. (author) / Nakamura, A. (author) / Aoki, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 175-176 ; 462-467

Publication date:

2001-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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