Low-pressure chemical vapour deposition growth of epitaxial silicon selective to silicon nitride

Lloyd, N. S. / Bonar, J. M. | British Library Online Contents | 2002

Low Temperature Selective and Lateral Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates

Jacob, C. / Pirouz, P. / Nishino, S. | British Library Online Contents | 2001

Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane

Jacob, C. / Hong, M.-H. / Chung, J. et al. | British Library Online Contents | 2000

Effects of contamination on selective epitaxial growth

MacDonald, B. J. / Paton, E. / Adem, E. et al. | British Library Online Contents | 2004

Epitaxial growth of asymmetric -silicon nitride nanocombs

Wang, Q. / Cui, Q. / Zhu, P. et al. | British Library Online Contents | 2010