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Low-pressure chemical vapour deposition growth of epitaxial silicon selective to silicon nitride
Low-pressure chemical vapour deposition growth of epitaxial silicon selective to silicon nitride
Low-pressure chemical vapour deposition growth of epitaxial silicon selective to silicon nitride
Lloyd, N. S. (author) / Bonar, J. M. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 310 - 313
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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