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Reactive pulsed laser deposition of thin TiN films

Craciun, V. / Craciun, D. / Boyd, I. W.

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Reactive pulsed laser deposition of thin TiN films

Craciun, V. / Craciun, D. / Boyd, I. W.

Reactive pulsed laser deposition of thin TiN films

Craciun, V. / Craciun, D. / Boyd, I. W.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Reactive pulsed laser deposition of thin TiN films

Contributors:

Craciun, V. (author) / Craciun, D. (author) / Boyd, I. W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 18 ; 178

Publication date:

1993-01-01

Size:

178 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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