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Thin films deposition in RF generated plasma by reactive pulsed laser ablation

Giardini, A. / Marotta, V. / Morone, A. / Orlando, S. / Parisi, G. P.

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Thin films deposition in RF generated plasma by reactive pulsed laser ablation

Giardini, A. / Marotta, V. / Morone, A. / Orlando, S. / Parisi, G. P.

Thin films deposition in RF generated plasma by reactive pulsed laser ablation

Giardini, A. / Marotta, V. / Morone, A. / Orlando, S. / Parisi, G. P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thin films deposition in RF generated plasma by reactive pulsed laser ablation

Contributors:

Giardini, A. (author) / Marotta, V. (author) / Morone, A. (author) / Orlando, S. (author) / Parisi, G. P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 197-198 ; 338-342

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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