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Analysis of buried oxide layer formation and mechanism of threading dislocation generation in the substoichiometric oxygen dose region
Analysis of buried oxide layer formation and mechanism of threading dislocation generation in the substoichiometric oxygen dose region
Analysis of buried oxide layer formation and mechanism of threading dislocation generation in the substoichiometric oxygen dose region
Nakashima, S. (author) / Izumi, K. (author)
1993-01-01
523 pages
Article (Journal)
Unknown
DDC:
620.11
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