Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Mechanisms of synchrotron radiation-excited etching reactions of semiconductor materials

    New search for: Ohashi, H.
    New search for: Yoshida, A.
    New search for: Tabayashi, K.
    New search for: Shobatake, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Mechanisms of synchrotron radiation-excited etching reactions of semiconductor materials

    New search for: Ohashi, H.
    New search for: Yoshida, A.
    New search for: Tabayashi, K.
    New search for: Shobatake, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Mechanisms of synchrotron radiation-excited etching reactions of semiconductor materials

    New search for: Ohashi, H.
    New search for: Yoshida, A.
    New search for: Tabayashi, K.
    New search for: Shobatake, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Mechanisms of synchrotron radiation-excited etching reactions of semiconductor materials

    Contributors:

    Ohashi, H. (author) / Yoshida, A. (author) / Tabayashi, K. (author) / Shobatake, K. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 69 ; 20

    Publication date:

    1993-01-01

    Size:

    20 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Synchrotron-radiation-excited etching of SiC

    Ogura, M. / Terakado, S. / Suzuki, S. et al. | British Library Online Contents | 1994

    Synchrotron radiation induced reactions on surfaces: mechanisms and applications

    Rosenberg, R. A. / Frigo, S. P. / Simons, J. K. | British Library Online Contents | 1994

    Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

    Katoh, T. / Yamaguchi, D. / Satoh, Y. et al. | British Library Online Contents | 2002

    Anisotropic etching of silicon nitride at low temperatures by synchrotron radiation

    Kitamura, O. / Goto, T. / Terakado, S. et al. | British Library Online Contents | 1994

    Synchrotron radiation stimulated etching SiO2 thin films with a contact cobalt mask

    Wang, C. / Urisu, T. | British Library Online Contents | 2005

    Back to top