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Growth of aluminum on Si using dimethyl-ethyl amine alane
Growth of aluminum on Si using dimethyl-ethyl amine alane
Growth of aluminum on Si using dimethyl-ethyl amine alane
Neo, Y. (author) / Niwano, M. (author) / Mimura, H. (author) / Yokoo, K. (author)
APPLIED SURFACE SCIENCE ; 142 ; 443-446
1999-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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