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Copper-Based Metallization for ULSI Applications
Copper-Based Metallization for ULSI Applications
Copper-Based Metallization for ULSI Applications
Li, J. (author) / Blewer, R. S. (author) / Mayer, J. W. (author)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 18 ; 18
1993-01-01
18 pages
Article (Journal)
Unknown
DDC:
620.11
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