Copper-Based Metallization for ULSI Applications

Li, J. / Blewer, R. S. / Mayer, J. W. | British Library Online Contents | 1993

Inlaid Copper Multilevel Interconnections Using Planarization by Chemical-Mechanical Polishing

Murarka, S. P. / Steigerwald, J. / Gutmann, R. J. | British Library Online Contents | 1993

Copper-Based Metallization in ULSI Structures

Li, J. / Seidel, T. E. / Mayer, J. W. | British Library Online Contents | 1994

Electrochemically Deposited Copper for ULSI Technology

Shacham-Diamand, Y. / Electrochemical Society; Electrodeposition Division | British Library Conference Proceedings | 1995

Materials Issues in Copper Interconnections

Harper, J. M. E. / Colgan, E. G. / Hu, C.-K. et al. | British Library Online Contents | 1994