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Ion beam synthesis of buried and surface nickel silicides during a single implantation step
Ion beam synthesis of buried and surface nickel silicides during a single implantation step
Ion beam synthesis of buried and surface nickel silicides during a single implantation step
Wu, M. F. (author) / De Wachter, J. (author) / Pattyn, H. (author) / Van Bavel, A.-M. (author) / Janssen, G. C. A. M. / Jongste, J. F. / Radelaar, S.
1993-01-01
246 pages
Article (Journal)
Unknown
DDC:
621.35
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