Precursor properties of calcium �-diketonate in vapor phase atomic layer epitaxy: Fid-Bau Portal

Precursor properties of calcium -diketonate in vapor phase atomic layer epitaxy

Aarik, J. / Aidla, A. / Jaek, A. / Leskelae, M.

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Precursor properties of calcium -diketonate in vapor phase atomic layer epitaxy

Aarik, J. / Aidla, A. / Jaek, A. / Leskelae, M.

Precursor properties of calcium -diketonate in vapor phase atomic layer epitaxy

Aarik, J. / Aidla, A. / Jaek, A. / Leskelae, M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Precursor properties of calcium -diketonate in vapor phase atomic layer epitaxy

Contributors:

Aarik, J. (author) / Aidla, A. (author) / Jaek, A. (author) / Leskelae, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 75 ; 33

Publication date:

1994-01-01

Size:

33 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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