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NbCl~3 as a precursor in atomic layer epitaxy

Elers, K.-E. / Ritala, M. / Leskelae, M. / Rauhala, E.

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NbCl~3 as a precursor in atomic layer epitaxy

Elers, K.-E. / Ritala, M. / Leskelae, M. / Rauhala, E.

NbCl~3 as a precursor in atomic layer epitaxy

Elers, K.-E. / Ritala, M. / Leskelae, M. / Rauhala, E.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

NbCl~3 as a precursor in atomic layer epitaxy

Contributors:

Elers, K.-E. (author) / Ritala, M. (author) / Leskelae, M. (author) / Rauhala, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 82/83 ; 468

Publication date:

1994-01-01

Size:

468 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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