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Time dependence of stress and hillock distributions during electromigration in thin metal film interconnections
Time dependence of stress and hillock distributions during electromigration in thin metal film interconnections
Time dependence of stress and hillock distributions during electromigration in thin metal film interconnections
Klinger, L. (author) / Glickman, E. (author) / Katsman, A. (author) / Levin, L. (author)
1994-01-01
15 pages
Article (Journal)
Unknown
DDC:
620.11
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